Semiconductor Industry - FMGE / FMDV Diaphragm Valve

Factory Test : 100% helium leak rate inspection.
Service Life : 5 million cycles.
Wetted Surface Roughness : 0.13 μm ( 5 uin )
Wetted Surface Polishing Process : Electrolytic polishing.
Assembly Environment : ISO Class 5 / Federal Standard 100 Cleanroom.
Packaging : Double-layer packaging completed in the cleanroom.