Semiconductor Industry

Semiconductor Industry - FMPR Pressure RegulatorSemiconductor Industry - FMPR Pressure Regulator

Semiconductor Industry - FMPR Pressure Regulator

Factory Test : 100% helium leak rate inspection.
Assembly Environment : ISO Class 5 / Federal Standard 100 Cleanroom.
Packaging : Double-layer packaging completed in the cleanroom.
Standard Average Inner Surface Roughness : Ra 0.25 μm (10 uin. ) orRa 0.13 μm ( 5 μin. ) selectable, ensuring minimal particle generation.

Specifications

Max. Operating Pressure 3500 Psig
Outlet Pressure Range 0 ~ 30 / 0 ~ 60 / 0 ~ 100 / 0 ~ 150 Psig
Internal Leakage Rate ≤ 1 x 10 - 11 Pa.m3/sec.He
External Leakage Rate ≤ 1 x 10 - 11 Pa.m3/sec.He
Operating Temperature -10 ~ 80℃
Flow Coefficient ( Cv ) 0.15

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