Semiconductor Industry - FMPR Pressure Regulator
Factory Test : 100% helium leak rate inspection.
Assembly Environment : ISO Class 5 / Federal Standard 100 Cleanroom.
Packaging : Double-layer packaging completed in the cleanroom.
Standard Average Inner Surface Roughness : Ra 0.25 μm (10 uin. ) orRa 0.13 μm ( 5 μin. ) selectable, ensuring minimal particle generation.
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